Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

Authors

E. Broitman, William & MaryFollow
Niklas Hellgren, University of Illinois at Urbana-ChampaignFollow
Zs Czigány, Linköpings universitetFollow
R. D. Twesten, University of Illinois at Urbana-ChampaignFollow
J. Luning, Stanford Synchrotron Radiation Lightsource
I. Petrov, University of Illinois at Urbana-ChampaignFollow
L. Hultman, Linköpings universitetFollow
B. C. Holloway, William & Mary

Document Type

Article

Publication Date

7-1-2003

Abstract

A systematic study of physical properties of sputter-deposited DLC films was performed as a function of flux ratio and ion energy. The energy and flux ions and neutral atoms impinging on the surface of the growing films were deduced from Langmuir probe measurements and theoretical calculations. The bombardment of growing films by the energetic particles led to changes in microstructure and mechanical properties. Results suggest that the presence of defective graphite formed by subplanted C and Ar atoms is the dominant influence on the mechanical properties of the DLC films.

Comments

Originally published as:

Broitman, E., Hellgren, N., Czigány, Zs., Twesten, R. D., Luning, J., Petrov, I., Hultman, L., & Holloway, B. C. (2003). Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 21(4), 851–859. https://doi.org/10.1116/1.1575231

Recommended Citation

Broitman, E.; Hellgren, Niklas; Czigány, Zs; Twesten, R. D.; Luning, J.; Petrov, I.; Hultman, L.; and Holloway, B. C., "Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering" (2003). Educator Scholarship & Departmental Newsletters. 103.
https://mosaic.messiah.edu/mps_ed/103