Title

Characterization of the metal-insulator interface of field-effect chemical sensors

Document Type

Article

Publication Date

6-15-2003

Abstract

The metal-insulator interface of hydrogen-sensitive metal-insulator-semiconductor capacitors, with SiO2 as the insulator and Pt as the metal contact, was discussed. It was found that the difference in hydrogen response between differently prepared devices was explained by a difference in concentration of available adsorption sites. The analysis showed that the concentration of Pt atoms in contact with the oxide affected both the hydrogen response and the metal-oxide adhesion.

This document is currently not available here.

Share

COinS