Spectroscopic Study of CNx Films Grown by Magnetron Sputter Deposition
The electronic structure of carbon nitride films has been studied using soft X-ray absorption and emission spectroscopy. Resonant N K-emission spectra show a strong dependence on excitation photon energies and the substrate temperatures, while C K-emission band appears insensitive to the different excitation photon energies and the substrate temperatures. Two nitrogen sites are assigned to N bonded to sp3-hybridized C and to N bonded to sp2-hybridized C.
Hellgren, Niklas; Guo, Jinghua; Zheng, Weitao; Såthe, Conny; Agui, Akane; Sundgren, Jan-Eric; and Nordgren, Joseph, "Spectroscopic Study of CNx Films Grown by Magnetron Sputter Deposition" (1999). Educator Scholarship. 10.