Title

Spectroscopic Study of CNx Films Grown by Magnetron Sputter Deposition

Document Type

Article

Publication Date

6-1-1999

Abstract

The electronic structure of carbon nitride films has been studied using soft X-ray absorption and emission spectroscopy. Resonant N K-emission spectra show a strong dependence on excitation photon energies and the substrate temperatures, while C K-emission band appears insensitive to the different excitation photon energies and the substrate temperatures. Two nitrogen sites are assigned to N bonded to sp3-hybridized C and to N bonded to sp2-hybridized C.

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