Title

Spectroscopic Study of CNx Films Grown by Magnetron Sputter Deposition

Document Type

Article

Publication Date

6-1-1999

Abstract

The electronic structure of carbon nitride films has been studied using soft X-ray absorption and emission spectroscopy. Resonant N K-emission spectra show a strong dependence on excitation photon energies and the substrate temperatures, while C K-emission band appears insensitive to the different excitation photon energies and the substrate temperatures. Two nitrogen sites are assigned to N bonded to sp3-hybridized C and to N bonded to sp2-hybridized C.

Comments

Guo, J.-H., Zheng, W. T., Såthe, C., Hellgren, N., Agui, A., Sundgren, J.-E., & Nordgren, J. (1999). Spectroscopic study of CNx films grown by magnetron sputter deposition. Journal of Electron Spectroscopy and Related Phenomena, 101–103, 551–554. https://doi.org/10.1016/S0368-2048(98)00350-8

Link to Full Text

  Contact Author

Share

COinS