Spectroscopic Study of CNx Films Grown by Magnetron Sputter Deposition

Authors

Niklas Hellgren, Messiah UniversityFollow
Jinghua GuoFollow
Weitao ZhengFollow
Conny SåtheFollow
Akane AguiFollow
Jan-Eric SundgrenFollow
Joseph NordgrenFollow

Document Type

Article

Publication Date

6-1-1999

Abstract

The electronic structure of carbon nitride films has been studied using soft X-ray absorption and emission spectroscopy. Resonant N K-emission spectra show a strong dependence on excitation photon energies and the substrate temperatures, while C K-emission band appears insensitive to the different excitation photon energies and the substrate temperatures. Two nitrogen sites are assigned to N bonded to sp³-hybridized C and to N bonded to sp²-hybridized C.

Comments

Guo, J.-H., Zheng, W. T., Såthe, C., Hellgren, N., Agui, A., Sundgren, J.-E., & Nordgren, J. (1999). Spectroscopic study of CNx films grown by magnetron sputter deposition. Journal of Electron Spectroscopy and Related Phenomena, 101–103, 551–554. https://doi.org/10.1016/S0368-2048(98)00350-8

Recommended Citation

Hellgren, Niklas; Guo, Jinghua; Zheng, Weitao; Såthe, Conny; Agui, Akane; Sundgren, Jan-Eric; and Nordgren, Joseph, "Spectroscopic Study of CNx Films Grown by Magnetron Sputter Deposition" (1999). Educator Scholarship & Departmental Newsletters. 10.
https://mosaic.messiah.edu/mps_ed/10