The Si3N4/TiN Interface: 1. TiN(001) Grown and Analyzed In situ using Angle-resolved X-ray Photoelectron Spectroscopy

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Angle-resolved x-ray photoelectron spectroscopy (AR-XPS) was used to analyze as-deposited epitaxial TiN(001) layers grown in situ. The films were grown by ultrahigh vacuum reactive magnetron sputtering onto MgO(001) at 600 °C in mixed 1:1 Ar/N2 discharges maintained at a total pressure of 0.5 Pa (3.75 × 10-3 Torr). AR-XPS spectra were obtained using incident monochromatic Al Kα radiation at 0.83401 nm. The results show that the TiN(001) surfaces are free of O and C. The Ti 2p photoelectron spectra of clean TiN are characterized by 2p3/2 and 2p1/2 lines appearing at 454.7 and 460.7 eV, each with corresponding satellite lines which are shifted ∼2.6 eV to higher binding energies. © 2012 American Vacuum Society.

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