Role of Nitrogen in the Formation of Hard and Elastic CNx Thin Films by Reactive Magnetron Sputtering
Carbon nitride films, deposited by reactive dc magnetron sputtering in Ar/N2 discharges, were studied with respect to composition, structure, and mechanical properties. CNx films, with 0
Hellgren, Niklas; Johansson, Mats P.; Briotman, Esteban; Hultman, lars; and Sundgren, Jan-Eric, "Role of Nitrogen in the Formation of Hard and Elastic CNx Thin Films by Reactive Magnetron Sputtering" (1999). Educator Scholarship. 8.