Title

Epitaxial growth of metastable δ-TaN layers on MgO(001) using low-energy, high-flux ion irradiation during ultrahigh vacuum reactive magnetron sputtering

Document Type

Article

Publication Date

11-1-2002

Abstract

An analysis of epitaxial growth of metastable δ-TaN layers on MgO(001) by the use of low-energy, high-flux ion irradiation during ultrahigh vacuum reactive magnetron sputtering was presented. High-resolution X-ray difftraction, transmission electron microscopy and Rutherford backscattering spectrometry was used for the analysis. The room-temperature resistivity, hardness, elastic modulus, and relaxed lattice constant were determined for the δ-TaN layers.

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