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Carbon nitride thin films deposited by dc unbalanced magnetron sputtering have been analyzed by high-resolution X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The XPS data show that N 1s binding states depend on substrate temperature (Ts). By comparison with the Raman spectra, N 1s binding states are assigned in which nitrogen atoms are mainly bound to sp2 and sp3 carbon atoms at Ts = 100°C, whereas at Ts = 500°C nitrogen atoms are mainly bonded to sp2, sp3 and sp1 carbon atoms.


Originally published as: Zheng, W.T., K.Z. Xing, N. Hellgren, M. Lögdlund, Å. Johansson, U. Gelivs, W.R. Salaneck, and J.-E. Sundgren. “Nitrogen 1s Electron Binding Energy Assignment in Carbon Nitride Thin Films with Different Structures.” Journal of Electron Spectroscopy and Related Phenomena 87, no. 1 (October 1997): 45–49.

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